Image producing method for use in electron beam device e.g. scanning electron microscope, involves reconducting particle beam to place, and rescanning particle beam over object from place

摘要

The method involves determining parameters, which are associated to a particle beam, where flow of the particle beam is determined as the parameter. A determination of whether changes of parameters occur is made. A place is determined at an object (5), at which the changes of the parameters occur, where the parameters are changed to a desired value. The particle beam is reconducted to the place, and the particle beam is rescanned over the object from the place. An independent claim is also included for an electron beam device e.g. scanning electron microscope.