Surface implemental IC lead/read gap survey instrument

摘要

PURPOSE:To inspect drifts of leads of a surface mounted IC without being affected by the generation precision of an inspection window. CONSTITUTION:The drift quantity is calculated based on the difference between the coordinates of a lead 15 detected from the first inspection region 13 generated including the inspection object lead 15 in the direction perpendicular to the lead 15 and the coordinates of a pad 11 detected from the second inspection region 14 generated including the pad 11 in front of the inspection object lead 15 in the direction perpendicular to the lead 15, and it is compared with the judgment value stored in advance to judge the quality of the inspection result.