ELECTRODE FOR ELIMINATING MINGLED MATTER, METHOD FOR ELIMINATING MINGLED MATTER AND ELIMINATING DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To directly dissolve mingled matter which is captured and to prevent the mingled matter from depositing on an electrode by providing catalyst which decomposes the mingled matter on the electrode surface which captures the electrified mingled matter by photoelectrons. ;SOLUTION: Ultraviolet radiation 3 radiated from an ultraviolet lamp 2 reaches photoelectron emitting member 5 passing through a quartz supporting plate 4 and emits photoelectrons 6. The emitted photoelectrons ionize mingled matter and the ionized mingled matter is attracted by an electrode 9 having an inverted potential of electrified charge by an electrical field. Mingled matter decomposing catalyst 8 exists on the surface of the electrode 9, therefore the mingled matter is decomposed by the catalyst 8 and eliminated as decomposed products 11 from the electrode surface. By the means a device need not be periodically stopped for eliminating the mingled matter adhering to the electrode, and contamination by the deposited mingled matter being rediffused in the device due to the operation of the mingled matter eliminating can be prevented.;COPYRIGHT: (C)1997,JPO