method and device for sputtering superconducting thin films of niobium in copper viertelwellen - resonanzhohlräume for accelerating heavy ions

摘要

A method of providing a thin film for lining quarter-wave resonant cavities of copper comprises the deposition of a superconducting material, in particular niobium, in the form of a micro-layer having a substantially constant thickness covering both the cylindrical surface of the cavity and its bottom formed of a plane plate, by biased-diode d.c. sputtering through emitting cathodes in a form fitting geometrically the surfaces to be lined. IMAGE