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Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
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机译:在铜的四分之一波谐振腔上溅射铌超导薄膜以加速重离子的方法和装置
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摘要
A method of providing a thin film for lining quarter-wave resonant cavities of copper comprises the deposition of a superconducting material, in particular niobium, in the form of a micro-layer having a substantially constant thickness covering both the cylindrical surface of the cavity and its bottom formed of a plane plate, by biased-diode d.c. sputtering through emitting cathodes in a form fitting geometrically the surfaces to be lined. IMAGE
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