OPTICAL THREE-DIMENSIONAL MEASURING INSTRUMENT, AND HOLOGRAM EXPOSURE METHOD AND OPTICAL AXIS ADJUSTMENT METHOD IN THE MEASURING INSTRUMENT

摘要

An optical three-dimensional measuring instrument in which confocal optical system comprising a hologram (3), a pinhole array (4) and a photodetector array (8) is provided two dimensionally and a light source (1) having coherence, comprising an inspection stage for supporting an object to be measured, a projection unit (22) for supporting an objective lens (5a) and the hologram to an optical axis portion and having a reference light incidence optical system (A) for causing reference light to be incident on the hologram, a pinhole array unit (22) for supporting the objective lens and the pinhole array to the optical axis portion, a measuring unit (24) for supporting relay lenses (7a, 7b) and the photodetector array to the optical axis portion, an object light incidence optical system (B) for causing object light to be incident on the hologram, and an exposure unit (34) having a reference light incidence optical system at the time of exposure, for causing reference light at the time of exposure, which branches from the object light incidence optical system, to be incident on the hologram. The projection unit, the pinhole array unit and the measuring unit are stacked from below in this order named on the inspection stage. The measuring unit and the exposure unit are exchangeable.