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MINIATURE PENDULUM TYPE ACCELEROMETER COMBINED WITH AC DRIVEN MAGNETOMETER
MINIATURE PENDULUM TYPE ACCELEROMETER COMBINED WITH AC DRIVEN MAGNETOMETER
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机译:微型摆式加速度计与交流驱动磁通量仪组合
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摘要
A magnetometer is integrated with a miniature vibrating beam accelerometer fabricated out of silicon on a common substrate. Dual pendulum-DETF force sensing accelerometers have integrated conductor coils on the pendulums that circulate alternating current to cause an additional pendulum motion also sensed by the DETF transducers for sensing local earth magnetic field. The integrated magnetic and acceleration sensing is used for each of three reference axes in a triaxial inclinometer magnetometer for borehole drill steering and surveying.
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