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Vacuum microelectronic field-emission device

机译:真空微电子场致发射装置

摘要

A vacuum microelectronic field-emission device comprises: a substrate (1); an emitter portion (2) formed to have at least a wedge portion extending in parallel to the substrate, the emitter portion being supported by the substrate; a gate portion (4) formed a first given distance apart from the tip of the emitter portion, the gate portion being supported by the substrate, the gate portion being electrically insulated (3) from the emitter portion; and a collector portion (5) formed a second given distance apart from a tip of the emitter portion, the collector portion being supported by the substrate, the second given distance is equal to or larger than the first given distance, the collector portion being electrically insulated (3) from the emitter portion and the gate portion.
机译:一种真空微电子场致发射装置,包括:基板(1);和发射极部分(2)形成为至少具有平行于基板延伸的楔形部分,该发射极部分由基板支撑。栅极部分(4)形成为与发射极部分的尖端相距第一给定距离,该栅极部分由基板支撑,该栅极部分与发射极部分电绝缘(3);收集器部分(5)与发射器部分的尖端隔开第二给定距离,该收集器部分由基板支撑,第二给定距离等于或大于第一给定距离,该收集器部分是电的与发射极部分和栅极部分绝缘(3)。

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