Deposition process of a ferromagnetic film on a wave guide, and magneto-optical component comprising a thin ferromagnetic film deposed by the process

摘要

The isolator includes a polariser (1), parallel to the direction (P1) of the wave (2) generated by a source (3), and an YIG waveguide covered by a magnetic film (5). An analyser (6) is shifted at 45 degrees relative to the polariser. The ferromagnetic film (16) is deposited on the waveguide surface using a chemical vapour phase deposition method. Simultaneously, the surface is irradiated with an ion beam at an incidence angle which favours a pre-determined crystalline orientation.