Multi-target driving device for pulsed laser deposition apparatus

摘要

The present invention relates to a multi-target driving device capable of growing a reproducible thin film of high quality when a thin film is grown on a substrate using a pulsed laser deposition apparatus, automating a deposition apparatus, and performing pulsed laser deposition economically /RTI A multi-target driving apparatus for a pulsed laser deposition apparatus of the present invention includes a stepping motor, a driving force providing unit configured to provide a rotational driving force to a target disc driving shaft and a target driving motor shaft, A target disk driving shaft, a head supporting frame, and a target driving motor shaft, wherein the target driving motor shaft, the target disk driving gear, the target disk driving gear, the target disk driving active gear, the target disk driving motor shaft, A driving force transmitting and supporting unit for transmitting a rotational driving force required for rotating the target disc and a target disc provided from a driving force supply unit and supporting the head of the target driving unit; A target holder, a target holder, and a plurality of target drive shafts, in order to position the target material at the focal point of the laser beam, a target disk, a target drive driven gear, a target drive active gear, a target holder fixing stub, And a head portion on which rotation of the target is performed.