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high energy body supply device and film formation method for crystalline thin film, and manufacturing method of electronic device
high energy body supply device and film formation method for crystalline thin film, and manufacturing method of electronic device
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机译:用于结晶薄膜的高能体供应装置和成膜方法,以及电子装置的制造方法
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摘要
the high quality of the melt crystallization was stable, and the manufacture of the energy supply device is started, a crystalline film formation method to express. melt crystallization energy supply system, the pollution is not just the surface of the crystallization in the control group. at the same time, the efficiency of energy use, and then use the reflecting body of the high.
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