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Nuts and bolts-type nozzle and nozzle for epoxy anti-poor government

机译:螺母和螺栓型喷嘴和环氧树脂防贫型喷嘴

摘要

The subject innovation is threaded on one side of the inner wall of the housing of the present invention relates to apparatus for injecting the epoxy (EPOXY) in semiconductor fabrication processes, especially, a columnar shape is formed, and a predetermined angle at a position maintaining the said screw thread with a predetermined distance at the other side of the housing and to have a narrowed bottleneck structure, the nut-shaped nozzle top surface of the bottle neck, the nozzle for spraying the epoxy is formed; A screw thread is formed on a side outer wall of the housing of a cylindrical shape that an inner pipe for delivery of an epoxy resin, a bolt having a position which holds the screw thread with a predetermined distance at the other side of the housing the narrow bottle neck structure at a predetermined angle By providing the fixing member even if the interval of the characteristics of the female thread and the male thread 0.1mm of nahap relationship was maintained in the present design eliminates the consideration of this, the residual developer or the leak of the epoxy resin.
机译:本发明涉及在壳体的内壁的一侧上拧有螺纹的本发明,涉及一种在半导体制造过程中注入环氧树脂(EPOXY)的设备,尤其是形成了圆柱形状,并且在保持位置的位置具有预定角度所述螺纹在壳体的另一侧具有预定的距离,并具有狭窄的瓶颈结构,形成瓶颈的螺母形喷嘴顶面,形成用于喷涂环氧树脂的喷嘴。在壳体的侧面外壁上形成有螺纹,该螺纹形成有用于输送环氧树脂的内管,该螺栓具有在壳体的另一侧以预定距离保持螺纹的位置。通过以固定角度设置狭窄的瓶颈结构,即使在本设计中,即使在内螺纹与外螺纹的特性的间隔保持为0.1mm的情况下,也通过设置固定部件,从而无需考虑残留显影剂或显影剂。环氧树脂泄漏。

著录项

  • 公开/公告号KR19980010700U

    专利类型

  • 公开/公告日1998-05-15

    原文格式PDF

  • 申请/专利权人 문정환;

    申请/专利号KR19960024152U

  • 发明设计人 안희택;

    申请日1996-08-12

  • 分类号H01L21/31;

  • 国家 KR

  • 入库时间 2022-08-22 02:46:57

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