A device for detecting the presence or absence of an abnormality in the thermocouple for temperature correction in a reaction chamber for a semiconductor manufacturing process

摘要

The purpose of this study is not to use professional meters, but also to easily confirm the abnormal situation of the temperature maintenance heat brigade installed in the reaction chamber for semiconductor manufacturing in a short time, so as to make the project go smoothly.For this reason,In this study, a lifebuoy (2) with a halide lamp (1) as a heating tool is used,A quartz tube (3) inserted and installed in the tube (2),An infrared thermometer (4) and for detecting the temperature of the tube (2) listed in the halide lamp (1),Insert the quartz tube (3) into the inner part to detect the temperature of the inner part of the quartz tube (3), and,According to the above infrared thermometer (4) and temperature assurance thermocouple (5) are respectively connected. When the halogen lamp (1) is heated, the temperature value detected by the infrared thermometer (4) and temperature assurance thermocouple (5) is compared to determine whether the temperature of temperature assurance thermocouple (5) is abnormal. The semiconductor manufacturing device (6) is composed of temperature controller (6) Abnormal detection device of Thermoelectric Group with temperature maintaining capacity in reaction chamber for engineering.