Automatic conveying equipment of semiconductor manufacturing line

摘要

And more particularly, to an automatic transport facility of a semiconductor manufacturing line in which at least two vehicles that are moved in a manufacturing line are connected to improve the transportation efficiency.;The present invention relates to an automatic transport equipment of a semiconductor manufacturing line equipped with a vehicle for transporting a conveyed object while moving to a rail, wherein at least two of the vehicles are connected to each other by a single driving device.;Therefore, according to the present invention, a plurality of vehicles can be moved together, thereby improving the transportation efficiency and reducing the maintenance cost, thereby reducing the production cost.