A method for process control and - regulation in the case of the surface machining of workpieces by means of pulsed laser radiation

摘要

A process-control method is described for the surface machining of workpieces with pulsed laser radiation and, if need be, process gas. The invention is distinguished by the fact that the laser-beam parameters relevant to the respective machining, the radiation, reflected from the machining point, of the machining laser and/or a probe laser, and/or the radiation emitted by the machining plasma are measured on-line, and that the measured values are analysed by actual-value/desired-value comparison in an EDP-assisted control unit. With the aid of this analysis, control of the laser-beam parameters required for adapting the actual values to the desired values and/or of the position of the workpiece by means of a suitable handling system and/or of the feed of the process gas is effected with the use of the control unit.