A method for attaching a carbon protection film to a magnetic disk by cathode sputtering superimposed ac voltage with a dc bias

摘要

PURPOSE: To prevent the formation of nodules on the surface of a target and to enable the continuous operation of a sputtering device by superimposing AC power on the DC power applied to the target in the meanwhile of the deposition of a carbon film. ;CONSTITUTION: In the meanwhile of the deposition of a carbon film, AC power e.g. 450 KHz, is superimposed on DC power applied to a target of sputtering to almost perfectly eliminate arcing in the process of sputtering and to decrease the formation of nodules. Since the frequency of AC power is generally lower than the frequency of ordinary high-frequency sputtering, a complicated circuit for the matching of impedance is made needless, and the operation and control of the sputtering are made simple.;COPYRIGHT: (C)1994,JPO