公开/公告号DE69502211D1
专利类型
公开/公告日1998-06-04
原文格式PDF
申请/专利号DE19956002211T
发明设计人 HORIE HIDEYOSHI C/O MITSUBISHI CHEMICAL CORP. USHIKU-SHI IBARAKI-KEN JP;FUJIMORI TOSHINARI C/O MITSUBISHI CHEMICAL CORP. USHIKU-SHI IBARAKI-KEN JP;NAGAO SATORU C/O MITSUBISHI CHEMICAL CORP. USHIKU-SHI IBARAKI-KEN JP;HOSOI NOBUYUKI C/O MITSUBISHI CHEMICAL CORP. USHIKU-SHI IBARAKI-KEN JP;GOTO HIDEKI C/O MITSUBISHI CHEMICAL CORP. USHIKU-SHI IBARAKI-KEN JP;
申请日1995-01-30
分类号H01S3/19;H01L33/00;H01L21/306;
国家 DE
入库时间 2022-08-22 02:42:18