Ink-jet printhead with thin film shape memory alloy

摘要

The printhead includes a thin film (0.3-5Ám) shape memory alloy 12 that is phase-transformed on heating (Fig. 6(C)) to eject ink droplets. On cooling (Fig.6(D)), the alloy buckles to its rest phase by the residual compressive stress and replacement ink is introduced into the chamber by capillary force. A method of producing the printhead includes depositing the alloy on a substrate, annealing the alloy, etching the substrate to expose the alloy that is transformed into an austenite by heating and then into a martensite by cooling.