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PECVD silicon nitride for etch stop mask and ozone TEOS pattern sensitivity elimination
PECVD silicon nitride for etch stop mask and ozone TEOS pattern sensitivity elimination
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机译:PECVD氮化硅用于蚀刻停止掩模和消除臭氧TEOS图案灵敏度
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摘要
This invention provides a method for forming dense electrode patterns having a high aspect ratio in a conductor metal layer. The method uses silicon nitride deposited using plasma enhanced chemical vapor deposition, PECVD, as an etch stop mask to protect the conductor metal and anti reflection coating when etching the electrode patterns. The PECVD silicon nitride is also used a mask to eliminate pattern dependence when forming inter-metal dielectric layers. The PECVD silicon nitride is also used as an etch stop mask when forming vias in the inter- metal dielectric for electrical conduction between electrode pattern layers.
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