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Piezoresistive silicon pressure sensor manufacture implementing long diaphragms with large aspect ratios
Piezoresistive silicon pressure sensor manufacture implementing long diaphragms with large aspect ratios
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机译:压阻式硅压力传感器制造商,实现了具有大长宽比的长膜片
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摘要
A form pressure sensor diaphragm and method of making that allows for formation of long rectangular plate structures in semiconducting materials, especially silicon. A plurality or multiplicity of sensors may be constructed on a single chip, thus providing for absolute and relative sensing of pressure on a single device.
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