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Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
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机译:使用自适应光刻技术形成的多芯片模块中的光导管和微波波导互连
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摘要
HDI fabrication techniques are employed to form a variety of optical waveguide structures in polymer materials. Adaptive optical connections are formed, taking into account the actual position and orientation of devices which may deviate from the ideal. Structures include solid light- conducting structures, hollow light-conducting structures which are also suitable for conducting cooling fluid, and optical switching devices employing liquid crystal material. A "shrink back" method may be used to form a tunnel in polymer material which is then filled with an uncured polymer material that shrinks upon curing.
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