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Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using 'safe' silicon source gas
Deposition of device quality, low hydrogen content, amorphous silicon films by hot filament technique using 'safe' silicon source gas
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机译:使用“安全”硅源气体通过热丝技术沉积器件质量,低氢含量,非晶硅膜
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摘要
A method of producing hydrogenated amorphous silicon on a substrate by flowing a stream of safe (diluted to less than 1%) silane gas past a heated filament.
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