Method and apparatus for calibrating a control apparatus for deflecting a laser beam

摘要

In a method for calibrating the deflection control of a laser beam a light-sensitive medium (5) is exposed to a laser beam (2) at predetermined positions for generating a test pattern (20), thereafter digitized partial pictures of pattern portions (21) of the test pattern (20) are produced and the digitized partial pictures are composed to a digitized overall picture of the test pattern (20). The correction data for the control (4) for deflecting the laser beam (2) are calculated on the basis of a comparison of actual positions of the laser beam (2) on the digitized overall picture with predetermined desired coordinates.