Method for determining a characteristically of a laser beam, the apparatus to calibrate a system to supply the laser beam, and,Method for calibrating a supply system of laser beam scanning

摘要

Method to determine a characteristically of a laser beam, the apparatus to calibrate a system of supply of the laser beam.And the method to calibrate a supply system of laser beam scanning.A method for determining the dimensions of a point of incidence (20) of the laser beam.Comprising: scanning the laser beam (18) in a path through a reference edge (30) having a photodetector (40) positioned behind the same; and measuring an output signal of the fotodetEctor (40) during scanning, the output signal corresponding to an area from the point of incidence of the laser beam (20) that focuses on the photodetector (40) during scanning.