CERAMIC MATERIAL HAVING THERMAL SHOCK RESISTANCE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic material having large mechanical strength even against a thermal. shock caused by abrupt temperature-increase, exhibiting sufficient corrosion resistance even to a cleaning gas having strong corrosivity such as SF₆ and Cl₂ to remarkably shorten the cleaning time and capable of improving the productivity of silicon wafers. ;SOLUTION: This ceramic material has an SiC coating film on the surface of a base material composed of SiC, Si₃N₄ and/or AlN and satisfies the intensity ratio I₉₇₂/I₇₉₆=0.4 to 1.2 wherein I₇₉₆ and I₉₇₂ are the intensity values of Raman spectrum at 950-1,050 cm^-1 and 750-850 cm^-1 determined by the Raman spectroscopic analysis with an argon-excited laser, respectively.;COPYRIGHT: (C)1999,JPO