METHOD AND DEVICE FOR MEASURING THICKNESS BY USE OF TRANSMITTED X-RAY AND METHOD FOR MEASURING PERCENTAGE OF SPECIFIC COMPONENT BY USE OF TRANSMITTED X-RAY

摘要

PROBLEM TO BE SOLVED: To accurately measure the thickness of a material for measurement in a sealed container or the like by use of transmitted X-rays. ;SOLUTION: An X-ray transmitted through the base material of a sealed container or the like is set so that the peak P of its entire spectrum is located near the K-absorption end of a material for measurement. The thickness of the material for measurement is measured from the intensity of the transmitted X-ray at the K-absorption end. The thickness X of the material for measurement can be calculated using the formula: X=ln(I(E₊)/I(E_-))/(μ(E_-)-μ(E₊)). In the formula, I(E₊) is the intensity of the X-ray near the high-energy side of the absorption end after it has been transmitted through the base material and the material for measurement, I(E_-) is the similar intensity of the X-ray near the low-energy side of the absorption end, μ(E₊) is the linear absorption coefficient of the material for measurement near the high energy side of the absorption end, and μ(E_-) is a similar linear absorption coefficient near the low energy side of the absorption end.;COPYRIGHT: (C)1999,JPO