X-RAY ANALYZING DEVICE AND A METHOD FOR THE SAME, CAPABLE OF SIMULTANEOUSLY MEASURING TRANSMITTED X-RAYS AND FLUORESCENCE X-RAYS

摘要

PURPOSE: An X-ray analyzing device and a method for the same are provided to analyze elements on a position of foreign materials detected by a transmitted X-ray device rapidly and accurately with fluorescence X-rays.;CONSTITUTION: An X-ray analyzing device comprises a transmitted X-ray testing unit(10), a fluorescence X-ray test unit(20), a specimen stage(50), a movable device(30), a foreign material position calculating member(60), and a movable device controlling member. The transmitted X-ray testing unit detects a first X-ray source and transmitted X-rays transmitted through a specimen from the first X-ray source. The fluorescence X-ray testing unit detects a second X-ray source and X-rays emitted from the specimen when irradiating X-rays from the second X-ray source. The movable device relatively moves a specimen stage between an irradiation position of the first X-ray source and an irradiation position of the second X-ray source. The foreign material position calculating member calculates a position of the foreign materials detected from the specimen by the transmitted X-rays.;COPYRIGHT KIPO 2013