SIMULTANEOUS MULTI-ELEMENTS ANALYSIS TYPE X-RAY FLUORESCENCE SPECTROMETER, AND SIMULTANEOUS MULTI-ELEMENTS X-RAY FLUORESCENCE ANALYZING METHOD

摘要

This multi-element simultaneous X-ray fluorescence analysis device is provided with a sample base (2) on which a sample (1) is mounted, a conveyance arm (22) for the sample (1), a stage (11) for moving the sample base (2), and an X-ray source (8) for radiating primary X-rays (7), a notch part (2e) through which the conveyance arm (22) passes in the vertical direction being formed in the sample base (2), a background correction means (21) storing in advance as the background intensity of a measurement point (Pn) an intensity obtained by subtracting the measured intensity of a reference measurement point (P0) on the notch part (2e) from the measured intensity of the measurement point (Pn), for each measurement point (Pn) in a blank wafer (1b), and the background correction means (21) subtracting the background intensity of the measurement point (Pn) from the measured intensity of the measurement point (Pn) and performing correction, for each measurement point (Pn) in a sample (1a) to be analyzed.