PIEZOELECTRIC-ELECTROSTRICTIVE FILM ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide an actuator, capable of obtaining a large curve displacement due to the lateral effect of a field induced distortion by a low-voltage drive and is also superior in responsiveness and can simplify or dispense with a wiring pattern to an electrode, without adversely affecting the curve displacement of a thin-walled substrate. SOLUTION: Piezoelectric-electrostrictive films 3 are laminated, and the films 3 are formed integrally on a thin-walled substrate 1, which has a perovskite crystal structure and consists of conductive ceramics via an intermediate layer 2 containing more than 40 wt.% of platinum(Pt) or palladium(Pd). Moreover, an electrode film 4 is laminated on the film 3, and the film 3 and a film 4 are formed integrally to constitute a piezoelectric-electrostrictive film actuator.