DEVICE FOR ANALYZING TRACE AMOUNT OF IMPURITY IN GAS

摘要

PROBLEM TO BE SOLVED: To measure trace amounts of various impurities effectively by integrally combining an atmospheric ionization mass spectrometer effective for measuring trace amounts of impurities in various high-purity gases with a gas chromatograph. ;SOLUTION: A device for analyzing trace amounts of impurities in gases is provided with the first analyzing system 7 to directly introduce a sample gas introduced from a sample gas introducing source to an atmospheres ionization mass spectrometer 6, the second analyzing system 9 to introduce a sample gas to the atmospheric ionization mass spectrometer 6 via a gas chromatograph 8, and a channel switching means to switch between both analyzing systems 7 and 9 as a channel of a sample gas. By providing the second analyzing system 9 having the gas chromatograph 8 in-between for the atmospheric ionization mass spectrometer 6 in addition to the first analyzing system 7 by a regular direct method and flowing a sample gas through the second analyzing system 9. it is possible to measure hydrogen and carbon monoxide in nitrogen, carbon monoxide, hydrogen, methane, carbon dioxide, nitrogen, etc., in hydrogen difficult to measure by a direct method, and it is possible to measure impurities in various gasses other than the above through the use of the first analyzing system 7 by a direct method.;COPYRIGHT: (C)1999,JPO