METHOD FOR SELECTIVELY MODIFYING INSIDE OF INORGANIC MATERIAL AND INORGANIC MATERIAL WITH SELECTIVELY MODIFIED INSIDE

摘要

PROBLEM TO BE SOLVED: To provide inorganic material in which the inside is selectively modified by convergent irradiation of pulsed laser beams. ;SOLUTION: Inorganic material 3 containing rare earth ions and/or transition metal ions is subjected to convergent and irradiation with pulsed laser beams 1 in which a beam-converging point 2 is controlled in the inside of inorganic material 3. Oxide, halide and glass containing one kind or at least two kinds of chalcogenide or crystal are used for inorganic material. Ions of Ce, Nd, Pr, Sm, Eu, Tb, Dy, Tm, Tb or the like are used for rare earth ions. Ions of Ti, Mn, Cr, V, Fe, Cu, Mo, Ru or the like are used for transition metal ions. When the beam-converging point 2 is relatively moved for inorganic material 3, the change region of ionic valency in the prescribed pattern is formed in the inside of inorganic material 3. Pulsed laser beams of 1 pico second pulse width is desirable. Thereby, the modified region of a necessary pattern is formed in the inside of inorganic material 3 because the valency of rare earth ions and/or transition metal ions is changed in the beam-converging point 2 and in the vicinity thereof but change in valency is not caused in the part excepting it.;COPYRIGHT: (C)1999,JPO