AIR FILTER ASSEMBLING, PACKAGING, AND PERFORMANCE TESTING METHOD, FAN FILTER UNIT ASSEMBLING AND PACKAGING METHOD, AND CLEAN ROOM, AND LOCAL FACILITY

摘要

PROBLEM TO BE SOLVED: To prevent emission of gaseous organic substances to a clean room immediate after operation of an air filter. ;SOLUTION: Materials which do not emit gaseous organic substances are used for materials for constituents of an air filter and a fan filter unit and packaging materials for the air filter and the fan filter unit. Assembling and packaging of the air filter and the fan filter unit are carried out in air free from gaseous organic substances. Aerosol obtained by dispersing a fine particle which does not emit gaseous organic substances in air containing no gaseous organic substances is used as aerosol to be used for testing the performance of the air filter. The air filter or the fan filter unit assembled, tested for the performance, and packed in such a manner and transported is installed in a clean room. Materials which do not emit gaseous organic substances are used for the materials of the floor, the walls, dry type seals, and wet type seals of the clean room.;COPYRIGHT: (C)1999,JPO