NUMERICAL SIMULATIONS OF AIR FLOW IN A FULL SCALE CLEAN ROOM INCORPERATING FAN CURVES OF FAN FILTER UNITS

摘要

This manuscript presents the air flow fields and pressure distributions of a full scale class 100 semiconductor clean room system using a computational fluid dynamics (CFD) model that incorporates flow resistances of various components in the air path. The fan-performance curves of fan filter unit (FFU), the pressure - velocity curves of the dry coil and the ULPA are included in the model. The pressure and velocity distributions of the present simulation are in reasonable agreement with the measurement in the real clean room system during operation. The numerical methodology of the present work is found to be a useful design tool of a FFU type clean room for the estimation of clean room pressure, velocity distribution and air exchange rate.