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Lens, semiconductor laser element, processing device thereof, manufacturing method of semiconductor laser element, optical element, optical device processing apparatus, and optical element processing method

机译:透镜,半导体激光元件,其加工装置,半导体激光元件的制造方法,光学元件,光学元件加工装置以及光学元件加工方法

摘要

The present invention relates to a lens processing apparatus for adjusting light output from a semiconductor laser device (10) to a desired optical characteristic. The lens (12) is located at one end of the semiconductor laser element (10), and the optical characteristic of the lens is measured by the wavefront measuring instrument (16) by the transmitted light. The machining laser beam is focused onto the lens surface via a beam splitter (14). The position adjusting device 22 adjusts the relative positional relationship between the lens surface and the focusing position of the machining laser beam, and the lens surface is processed in this state. The ultraviolet laser 18 and the position adjustment device are controlled by a control arithmetic unit 24. In the control operation apparatus, the processing data of the wavefront measuring instrument is used to calculate machining data to bring the light passing through the lens to the desired optical characteristic. This processing enables optical characteristics such that the transmitted light of the lens becomes a true circle.
机译:透镜处理装置技术领域本发明涉及一种透镜处理装置,该透镜处理装置用于将从半导体激光装置(10)输出的光调整为期望的光学特性。透镜(12)位于半导体激光元件(10)的一端,并且透镜的光学特性由波前测量仪器(16)通过透射光来测量。加工的激光束通过分束器(14)聚焦到透镜表面上。位置调节装置22调节透镜表面和加工激光束的聚焦位置之间的相对位置关系,并且在该状态下对透镜表面进行处理。紫外线激光器18和位置调节装置由控制算术单元24控制。在控制操作装置中,波前测量仪器的处理数据用于计算加工数据,以使通过透镜的光到达所需的光学位置。特性。通过该处理,能够使透镜的透射光成为真圆的光学特性。

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