首页> 外国专利> Lens, semiconductor laser element, processing apparatus thereof, manufacturing method of semiconductor laser element, optical element, optical element processing apparatus, and optical element processing method

Lens, semiconductor laser element, processing apparatus thereof, manufacturing method of semiconductor laser element, optical element, optical element processing apparatus, and optical element processing method

机译:透镜,半导体激光元件,其加工装置,半导体激光元件的制造方法,光学元件,光学元件加工装置以及光学元件加工方法

摘要

This invention relates to a lens machining device for machining a lens so that the optical characteristics of light outputted by a semiconductor laser element (10) will be adjusted to desired ones. The lens (12) to be machined is provided at one end of the element (10) and the optical characteristics of the lens (12) are measured with a wave front measuring instrument (16) through the use of the light transmitted through the lens (12). A machining laser beam is focused upon the surface of the lens (12) through a beam splitter (14). The surface of the lens (12) is machined with the laser beam while a position adjusting device (22) adjusts the relative positional relation between the surface of the lens (12) and a position where the laser beam is focused. An ultraviolet laser (18) and the position adjusting device (22) are controlled by a controlling arithmetic device (24). The controlling arithmetic device (24) calculates machining data that bring the optical characteristics of the light transmitted through the lens (12) closer to the desired ones by using the measurement data from the wave front measuring instrument (16). When the lens is machined in such a way, the light transmitted through the lens (12) may have such optical characteristics that the shape of the light beam is a true circle. IMAGE
机译:透镜加工装置技术领域本发明涉及一种透镜加工装置,该透镜加工装置用于对透镜进行加工,以使由半导体激光元件(10)输出的光的光学特性调整为期望的值。待加工的透镜(12)设置在元件(10)的一端,并且通过波前测量仪器(16)利用透过透镜的光来测量透镜(12)的光学特性。 (12)。加工激光束通过分束器(14)聚焦在透镜(12)的表面上。透镜(12)的表面用激光束加工,而位置调节装置(22)调节透镜(12)的表面与激光束聚焦位置之间的相对位置关系。紫外线激光器(18)和位置调整装置(22)由控制运算装置(24)控制。控制运算装置(24)使用来自波前测量仪器(16)的测量数据,计算出使通过透镜(12)透射的光的光学特性更接近期望的加工数据。当以这种方式加工透镜时,透射过透镜(12)的光可以具有这样的光学特性,即光束的形状为真圆。 <图像>

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