RASTER MODE SCANNING APPARATUS FOR COMPENSATING DISTURBANCE EFFECT OF MECHANICAL VIBRATION AFFECTING SCANNING STEP

摘要

PROBLEM TO BE SOLVED: To rapidly compensate a disturbance effect of a mechanical vibration affecting a scanning step at a low cost in an apparatus for scanning in a raster mode or particularly a raster microscope. SOLUTION: The raster mode scanning apparatus comprises a sensor 2 for sensing a mechanical vibration and driving a filter 3 connecting its output to an adder 4 together with the output of a generator for a z signal. In this case, the output of the adder 4 drives a unit for altering the distance between a sample 7 and a sensor 5. That is, the apparatus controls the unit for altering the distance between the sample 7 and the sensor 5 according to the output of the adder 4, and substantially compensates (corrects) a disturbance effect of the vibration affecting the step.