BOARD INSPECTING X-RAY CAMERA AND X-RAY BOARD INSPECTING DEVICE AS WELL AS X-RAY BOARD INSPECTING METHOD

摘要

PROBLEM TO BE SOLVED: To reduce the quantity of radiation of a X-ray directly to a CCD sensor, restrict the seizure phenomenon of the CCD sensor and improve the life of the CCD sensor. ;SOLUTION: A X-ray radiated from a X-ray source 1 to a board 2 is injected to a filter plate 4 after transmitted through the board 2, to filter a soft X-ray component, and the X-ray from the filter plate 4 is transformed into a visible light by a scintillator 5, the visible light being deflected by a reflecting prism 10 and then injected into a CCD sensor 6 which is so arranged as to avoid the X-ray transmitted through the scintillator 5. The CCD sensor 6 receives only the visible light because the X-ray, not transformed into the visible light by the scintillator 5, is transmitted through the reflecting prism 10.;COPYRIGHT: (C)1999,JPO