METHOD FOR MANUFACTURING SAMPLE FOR MEASURING CRYSTAL LATTICE DISTORTING AND METHOD FOR MEASURING CRYSTAL LATTICE DISTORTION

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a sample for measuring crystal lattice distortion for avoiding the separation of HOLZ(higher order layer zone) line and a method for measuring a crystal distortion lattice with improved accuracy. ;SOLUTION: First, a sample piece 1 including a measuring part 2 is cut from a wafer. Then, film 8 is deposited on the surface of the sample piece 1 so that the measuring part 2 is covered. Then, three dummy pieces 4 are applied with the sample piece 1 is in the middle and a sample block 3 is manufactured. The sample block 3 is cut along two cutting surfaces 5a and 5b that are vertical to the sample piece 1 with the measuring part 2 in-between, thus manufacturing a sample cutting piece. Then, a desired polishing finish is performed to both surfaces of the above sample cut piece for exposing the measuring part 2, thus obtaining a section sample 6 for TEM(transmission type electron microscope) where the measuring part 2 is thinned. Convergence electron rays 7 are applied to the section sample 6 thus manufactured using the TEM to measure a HOLZ pattern.;COPYRIGHT: (C)1999,JPO