X-RAY LITHOGRAPHY DEVICE AND X-RAY ALIGNING METHOD

摘要

PROBLEM TO BE SOLVED: To enable an image to be corrected for distortions and magnification by a method, wherein an X-ray reflecting drive system is connected to an X-ray reflecting mirror which is so constituted as to very reflection conditions according to an in-plane position, and an X-ray reflecting mirror control system is connected to the X-ray reflecting mirror drive system. ;SOLUTION: An X-ray reflecting mirror 805 is connected to an X-ray reflecting mirror drive system 811, which is controlled by an X-ray reflecting mirror control system 810 which controls the orientation and swing of the X-ray reflecting mirror 805 and the position of X-rays incident on the reflecting mirror 805. An X-ray detector 807 measures the parallelism of X-rays reflected from the X-ray reflecting mirror 805 in a horizontal and a vertical direction as two-dimensional data, the X-ray detection signals are inputted into the X-ray reflecting mirror control system 810 to drive the X-ray reflecting mirror 805, and the pattern of an X-ray mask 812 is transferred to an exposure substrate 814. Moreover, the X-ray reflecting mirror 805 is varied in light-reflecting characteristics according to its in-plane 1 position.;COPYRIGHT: (C)1999,JPO