PRODUCTION OF TRICHLOROSILANE HAVING REDUCED DICHLOROSILANE CONTENT

摘要

PROBLEM TO BE SOLVED: To selectively convert dichlorosilane into trichlorosilane and to enable the suppression of the byproduction of a high-order chloride such as quaternized silicon, by reacting a mixture of dichlorosilane and trichlorosilane with hydrogen chloride in the presence of activated carbon at a specific temperature so as to convert dichlorosilane to trichlorosilane. ;SOLUTION: A packed tower is packed with activated carbon which has 8-40 Å pore diameter showing the maximum peak in a pore distribution curve obtained by steam adsorption method and contains no metal catalyst. A mixture of ≤85 wt.%, preferably ≤50 wt.% of dichlorosilane and ≤50 wt.% of the total of trichlorosilane and quaternized silane is brought into contact with the activated carbon at 0-70°C, preferably 0-50°C, more preferably 0-30°C for 0.5-50 seconds to selectively convert dichlorosilane to trichlorosilane. The activated carbon used is not specific one and activated carbon on the market is sufficiently used.;COPYRIGHT: (C)1999,JPO