PURPOSE:To improve the reproducibility of the dimensional precision and sample size and facilitate the fitting of a sample by fitting a chuck to a chuck jig in advance, and fitting the sample to a chuck portion. CONSTITUTION:One of a pair of chucks 8, a spacer 6 and a pressing spacer 7 are fitted to a chuck jig in sequence, then the chuck jig is fitted, and the other chuck 8 is pressed and fixed by the tip of a pressing bar 4 pressed by a compressed coil spring 6. One end of a thread-shaped sample 9 is inserted between a chuck upper cover 10 and a chuck lower cover 11, a chuck fixing screw 12 is fastened so that the sample 9 is not loosened, and the sample 9 is fitted to the chuck jig. The film-shaped or thread-shaped sample 9 can be fitted to the chucks 8 simply and quickly with good dimensional precision and reproducibility.
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