Measuring method null of metal impurity in

摘要

PURPOSE:To measure the metal impurity in gas with high accuracy by collecting the metal impurity in the gas by porous polymer beads and subsequently quantifying the metal inpurity taken in a solution. CONSTITUTION:As porous polymer beads, a packing agent for a gas chromatograph can be used as it is and there is no limit with respect to a sample gas to be measured. For example, after poravac Q is washed, a column 11 is packed with it to be interposed between a gas container 1 and an absorbing solution (dilute hydrochloric acid) 5. Then, 2l of the sample gas containing 10% of BCl3 is allowed to flow through nitrogen gas at a rate of 0.1 l/min at room temp. Dilute hydrochlric acid is allowed to flow through the detached column 11 to take in the metal collected by the porous polymer beads and the content of the metal in the solution is measured by an ICP light emitting analyser and an FLAAS device. At the same time, the content of the metal in the solution is quantified and the amount of the metal impurity passed through the column 11 is measured. By this method, the adverse effect on analysis due to the kind of the sample gas can be prevented and metal having a particle size of 0.05 mum or less can be collected.