COATING LIQUID FOR USE IN FORMING ELECTRICALLY CONDUCTIVE FILM, METHOD FOR FORMING ELECTRICALLY CONDUCTIVE FILM, AND METHOD FOR FORMING ELECTRICALLY CONDUCTIVE FILM OF LOW REFLECTIVITY

摘要

PROBLEM TO BE SOLVED: To provide a coating liquid for use in forming electrically conductive film that can form an electrically conductive film contributing to the improvement of contrast due to the occurrence of absorption over the whole visible light region, and also excellent in low reflectivity by heat treatment at a low temperature, by using a sol of metal fine particles of Ru. ;SOLUTION: This coating liquid for use in forming electrically conductive film is prepared by dispersing metal fine particles of Ru homogeneously in a sol form in water, an organic solvent or the like. Fine particles formed by chemical reduction of a Ru salt are preferably used. The average coagulated particle diameter and the powder volume resistance of the metal particles are preferably 200 nm or less and 0.01 ohm.cm or less, respectively. This coating liquid may contain a silicon compound for adjusting the surface tension, the spreadability and the like of the liquid, and may also contain a metal oxide of Sn, Sb, In or the like, for example, for adjusting the thickness of the resulting conductive film. An electrically conductive film having a low reflectivity is provided by forming, on this electrically conductive film, a film having a lower refractive index than that of this film (SiO₂ or MgF₂).;COPYRIGHT: (C)1999,JPO