Lead content perovskite structural compound oxide ferroelectric thin film, the manufacturing method and material

摘要

PURPOSE: To stably obtain the thin film having excellent dielectric characteristics by using a lead-containing ferroelectric compound oxide expressed by a specific general formula as the constituent component and restricting the total amount of Li, Na and K existing in the oxide as impurities below a specific level. ;CONSTITUTION: The ferroelectric thin film is composed of a compound oxide having lead perovskite structure and expressed by the general formula (x and y are 0 or positive number of 1) and containing ≤1ppm of Li, Na and K in total as impurities. The film is produced by the following procedures. The constituent components for the production of the ferroelectric thin film are purified in the form of organometallic compounds by repeating the distillation, sublimation, recrystallization or their combination. The purified components are dissolved in an organic solvent to obtain a film-forming coating liquid having prescribed composition and the liquid is applied to a substrate, dried and baked.;COPYRIGHT: (C)1993,JPO&Japio