Laser processing device, laser generator and laser processing manner

摘要

PURPOSE:To execute a minute working by UV rays with a high accuracy, by a simple device and at a low cost, in a laser beam machine for performing minute hole working to an organic material, etc., such as an overcoat of a color filter and a resin film of a semiconductor multi-layer film. CONSTITUTION:Since a miniature Nd: YAG laser 100 is used as the light source of UV rays, a laser oscillating part 1 and a microscope part 2 are constituted integrally. Also, as for the microscope part 2, an optical system 31a, etc., for allowing a visible light to UV rays to transmit through are used, therefore, UV rays are condensed and can be radiated to a body to be irradiated by using the microscope part 2, and also, the monitor observation of an irradiated position by a visible light and an observation by the naked eyes of an enlarged image. Since wavelength of this UV rays is 300nm-400nm, its optical system can be constituted so as to allow both of the UV rays and the visible light to transmit through by only applying a change in a design level to the optical system of the microscope part 2. That is, the laser oscillating part 1 for outputting the UV rays and the microscope part 2 can be constituted integrally by the simple device and at a low cost, and minute working by the UV rays can be executed with a high accuracy.