METHOD OF WRITING GRID FOR NON-LOCALIZING STITCH ERROR

摘要

PROBLEM TO BE SOLVED: To remove the adverse influence of stitch errors, by selecting the stepwise irradiation dose so that each of lattice elements in overlapped regions receives the same total dose when all fields are written. ;SOLUTION: A dose increases and then decreases stepwise by unit AU, starting from 1AU to 5AU and from 5AU to 1AU, respectively, over an n-th, (n+1)-th fields 11 and (n+2)-th field 11'. The step width at 5AU is twice that of other step, resulting in that the total dose per line over the entire length of the (n+1)-th field 11 is 6AU adjusted so as to slightly exceed the developable threshold dose. A half of each of two side fields at the field end is not overlapped with other field and hence the dose level is zero.;COPYRIGHT: (C)1999,JPO