Flank form measuring method null of the gear by the non-contact free curved surface

摘要

PURPOSE:To measure and analyze a gear having a curved surface tooth flank by collecting the data of the incident angle of the object light at each point on an inspected tooth flank from a theoretical tooth flank image obtained through the simulation method. CONSTITUTION:The interference light supplied from a light source 1 is separated, and a hologram image is obtained by the reflection light supplied from the object light S which irradiates an aimed surface and the reference light R. The shape of an image caught by a camera 8 is calculated from the gear specification by an MPU 12, and a simulation image is obtained. The hologram of the standard tooth flank A of a standard gear 6 which is photographed by the camera 8 and the image of a standard tooth flank B on which a part of an other tooth of the gear 6 is cut are superposed, and the original point of coordinates is determined. The positive reflection image of the measured gear as measurement object and the hologram of the tooth flank A are superposed, and a holographic interference image is obtained, and superposed to the simulation image obtained from the specification. Accordingly, the correspondence data between the incident angle of the article light S at each point based on the original point of coordinates and the phase of interference fringe is collected, and the shape error of the inspected tooth flank for the standard surface is measured.