LiNbO3 thin film optical waveguide device and process for its production

摘要

The optical waveguide device of LiNbO₃ efficiently guides both or either of ordinary ray and extraordinary ray of visible light in the short wavelength region. It is prepared by forming an LiNbO₃ thin film (22) optical waveguide on an LiNbO₃ substrate (21) undoped or doped with MgO, with or without a base layer (23) interposed between them, by liquid phase epitaxy which employs Li₂OB₂O₃ as a flux.