首页> 外国专利> Interconnection track connecting by several levels of metal an isolated gate of a transistor to a discharge diode inside an integrated circuit and method of manufacturing such a track

Interconnection track connecting by several levels of metal an isolated gate of a transistor to a discharge diode inside an integrated circuit and method of manufacturing such a track

机译:通过几个金属层将晶体管的隔离栅极连接到集成电路内部的放电二极管的互连走线及其制造方法

摘要

The multiple level interconnection track connects an isolating grid (GR) to a discharge diode (DD). The track configuration has a first layer of track extending under the highest level metallisation level. The highest point (M2) is connected to the grid and has a length (L1) above a critical length. A second length (L2) is selected in the first track, having a length below the critical length. A space is formed between two isolating layers (IS1,IS2) on the same metallisation level (M1) then filled with metallic deposition (CT1) forming contact between the two lower sections of track (BP1,BP2) forming a track following the initial geometric configuration.
机译:多层互连轨道将隔离栅(GR)连接到放电二极管(DD)。轨道配置具有在最高水平的金属化水平下延伸的第一轨道层。最高点(M2)连接到电网,并具有高于临界长度的长度(L1)。在第一轨道中选择第二长度(L2),其长度低于临界长度。在同一金属化层(M1)的两个隔离层(IS1,IS2)之间形成一个空间,然后填充金属沉积层(CT1),在轨道的两个下部(BP1,BP2)之间形成接触,从而形成遵循初始几何形状的轨道组态。

著录项

  • 公开/公告号EP0890992A1

    专利类型

  • 公开/公告日1999-01-13

    原文格式PDF

  • 申请/专利权人 STMICROELECTRONICS SA;

    申请/专利号EP19980401704

  • 发明设计人 BOREL JOSEPH;

    申请日1998-07-06

  • 分类号H01L27/02;

  • 国家 EP

  • 入库时间 2022-08-22 02:19:35

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