Carbon nitride (CxNy) thin film coating equipment

摘要

A trigger electrode for generating an arc on the surface of the carbon ion source target metal attached to the cathode body and an arc control means for restraining the discharge arc by forming a magnetic field of the cylindrical electromagnet and the target metal provided at the outer periphery of the cathode body. A negative arc arc power source including a permanent magnet variably provided at the rear of the arc generating surface, a cylindrical vacuum chamber bent to receive the negative arc arc power source and a substrate disposed to face the arc arc power source, and to block the atmosphere; It includes a magnetic field filter surrounding the outer circumference of the chamber so that the carbon charged particles evaporated from the metal can be transferred to the substrate by the formation of a magnetic field, and the carbon ions emitted from the target metal and the nitrogen ions of the active gas injected into the chamber react. the carbon nitride (C _X N _Y) thin film magnetic filter using a cathodic arc discharge to be deposited on the substrate The carbon nitride thin-film coating apparatus is disclosed.